Package with interconnections having different melting temperatures

ABSTRACT

A package comprising at least one electronic chip, a first heat removal body on which the at least one electronic chip is mounted by a first interconnection, a second heat removal body mounted on or above the at least one electronic chip by a second interconnection, and an encapsulant encapsulating at least part of the at least one electronic chip, part of the first heat removal body and part of the second heat removal body, wherein the first interconnection is configured to have another melting temperature than the second interconnection.

BACKGROUND OF THE INVENTION Field of the Invention

The present invention relates to packages, to a vehicle, to a method ofuse, and to a method of manufacturing a package.

Description of the Related Art

A power module, for instance for automotive applications, provides aphysical containment for power components, usually power semiconductordevices in form of electronic chips comprising one or more integratedcircuit components. Examples of integrated circuit components of powermodules are an insulated-gate bipolar transistor (IGBT), and a diode.

For such and other packages, it is desired that stacking variouselements during packaging is carried out with high spatial accuracy,reproducibility and reliability. Furthermore, it is desirable that thedesign of a package is not excessively limited by too many constraints.This is however difficult to achieve with conventional approaches.

SUMMARY OF THE INVENTION

There may be a need for a reliable package manufacturable with a highdegree of freedom.

According to an exemplary embodiment, a package is provided whichcomprises at least one electronic chip, a first heat removal body onwhich the at least one electronic chip is mounted by a firstinterconnection, a second heat removal body mounted on or above the atleast one electronic chip by a second interconnection, and optionally anencapsulant encapsulating at least part of the at least one electronicchip, part of the first heat removal body and part of the second heatremoval body, wherein the first interconnection is configured to haveanother melting (or re-melting) temperature than the secondinterconnection.

According to another exemplary embodiment, a package is provided whichcomprises at least one electronic chip, a first heat removal body onwhich the at least one electronic chip is mounted by a firstinterconnection, a second heat removal body mounted above the at leastone electronic chip, at least one spacer body arranged between the atleast one electronic chip and the second heat removal body, a secondinterconnection connecting the at least one electronic chip with the atleast one spacer body, a third interconnection connecting the at leastone spacer body with the second heat removal body, and optionally anencapsulant encapsulating at least part of the at least one electronicchip, at least part of the at least one spacer body, part of the firstheat removal body and part of the second heat removal body, wherein oneof the first interconnection, the second interconnection, and the thirdinterconnection has another melting (or re-melting) temperature than atleast one other of the first interconnection, the secondinterconnection, and the third interconnection.

According to still another exemplary embodiment, a vehicle is providedwhich comprises one of the packages having the above mentioned features.

According to yet another exemplary embodiment, a method of manufacturinga package is provided, wherein the method comprises mounting at leastone electronic chip on a first heat removal body by a firstinterconnection, mounting a second heat removal body on or above the atleast one electronic chip by a second interconnection, optionallyencapsulating at least part of the at least one electronic chip, part ofthe first heat removal body and part of the second heat removal body byan encapsulant, and configuring the first interconnection to haveanother melting (or re-melting) temperature than the secondinterconnection.

According to yet another exemplary embodiment, a method of manufacturinga package is provided, wherein the method comprises mounting at leastone electronic chip on a first heat removal body by a firstinterconnection, mounting at least one spacer body on the at least oneelectronic chip by a second interconnection, and mounting a second heatremoval body on the spacer body by a third interconnection, wherein oneof the first interconnection, the second interconnection, and the thirdinterconnection has a melting (or re-melting) temperature different fromthe other two of the first interconnection, the second interconnection,and the third interconnection.

According to yet another exemplary embodiment, one of the packageshaving the above mentioned features is used for an automotiveapplication.

According to an exemplary embodiment of the invention, a package ormodule which may be configured for double-sided cooling is providedwhich has a very high reliability and freedom of design. Such a packagesandwiches at least one electronic chip between two opposing heatremoval bodies, wherein the entire arrangement may be optionallyencapsulated by an encapsulant. During the manufacturing procedure,interconnections are formed between first heat removal body andelectronic chip, as well as between electronic chip and second heatremoval body (with an optional spacer body in between). It has turnedout that, when interconnections used for interconnecting the describedconstituents are all configured identical (for instance are all made ofthe same material) and all have the same melting point, allinterconnections (even already completed interconnections) may meltsimultaneously during the interconnection formation procedures. It hashowever turned out that such a simultaneous melting of two, three oreven more interconnections of the package may result in reliabilityissues such as the formation of unfilled gaps, positional inaccuracy ofindividual elements of the package and/or reflow of interconnectionmaterial into undesired spaces within the package. However, it hasfurthermore been recognized by the present inventors that selection ofthe material, type, temperature characteristics, etc. of the differentinterconnections of different melting or re-melting temperatures allowsto strongly suppress or even eliminate the mentioned and otherreliability issues during interconnect procedures of interconnecting thevarious elements by the various interconnections.

DESCRIPTION OF FURTHER EXEMPLARY EMBODIMENTS

In the following, further exemplary embodiments of the packages, thevehicle, and the methods will be explained.

In the context of the present application, the term “interconnection”may particularly denote an interface or a material capable ofinterconnecting two constituents of the package (in particularelectronic chip with one of heat removal bodies and/or electronic chipwith an optional spacer body in between and/or one of heat removalbodies with an optional spacer body) by increasing the temperature up toor above an interconnection temperature at which interconnection betweenthe interconnecting material with the adjacent constituents or betweenthe adjacent constituents without additional interconnection materialstarts.

In case of a solder material, such a temperature may be the meltingtemperature of solderable interconnection material.

“Sintering” may in particular denote a process of compacting and forminga solid mass of material by heat and/or pressure without fully meltingit beyond the point of liquefaction. A driving force for densificationis the change in free energy from the decrease in surface area andlowering of the surface free energy. Sintering may form modified butlower-energy solid-solid interfaces with a total decrease in freeenergy. In case of sintering, the interconnection temperature may hencebe a temperature at which a powderous or granular structure to beinterconnected starts forming an integral structure.

Welding is an interconnection technique which does not or does notnecessarily involve any or any considerable amount of material inaddition to the material of the constituents to be interconnected.Instead of such additional material, a welding interconnection may beformed by the mere supply of thermal energy to an interface of the twoconstituents to be interconnected. Hence, welding joins materials of theconstituents by causing fusion between them by melting these basematerials of the constituents directly together. In addition to meltingthe base material, a filler material may be optionally added to thejoint to form a pool of molten material that cools to form a joint thatcan be as strong, or even stronger, than the base material. Pressure mayalso be used in conjunction with heat during welding, or by itself, toproduce a weld.

In the context of the present application, the term “melting orre-melting temperature” may denote a temperature at which an alreadyformed interconnection is lost or the constituents become separateagain, because material of or at the interface of the two constituentsbecomes liquid or flowable again. It should be said that, withinterconnections involving an interconnection material (such as a solderconnection involving a solderable material or a sinter connectioninvolving a sinterable material) the interconnection material itself mayhave the tendency to re-melt when another interconnection is establishedinvolving a temperature above the melting temperature of the formerinterconnection material. However, when a previous interconnection hasbeen established with such an interconnection material, at the interfacebetween the two elements interconnected by the interconnection material,an alloy may have been formed. Such an alloy may comprise material ofthe interconnection material and in some cases additionally material ofone or both of the interconnected constituents. Thus, the interconnectmaterial being now intermingled with adjacent material may have anothermaterial composition and thus another re-melting temperature than theoriginally used interconnection material before establishing theinterconnection for the first time. Therefore, the re-meltingtemperature of interconnection material after the first formation of aninterconnection may differ from its original melting temperature.

In view of the foregoing, it may be advantageous to stack the electronicchip(s) and the spacer body/bodies between two heat removal bodies,wherein interconnections of at least two different melting and/orre-melting temperatures may be implemented. Furthermore, it may beadvantageous that, after having established one or more of theinterconnections involving heating at least up to the respectiveinterconnection temperature, subsequently formed interconnections shouldbe configured so that they involve heating to an interconnectiontemperature (such as a melting temperature of interconnection material)which is lower than a melting or re-melting temperature of the alreadypreviously established one or more interconnections. It can then beprevented that already formed interconnections melt or re-melt andrender the constituents of the package spatially inaccurate.

In an embodiment, forming the last of the first interconnection, thesecond interconnection, and the third interconnection is carried out ata low enough interconnection temperature that the other two previouslyformed interconnections are prevented from re-melting during forming thelast interconnection. A corresponding measure can be taken when only twointerconnections are formed: forming the last of the firstinterconnection and the second interconnection may then be carried outat a low enough interconnection temperature that the other previouslyformed interconnection is prevented from re-melting during forming thelater interconnection. Thus, during formation of the last of theinterconnections, a sufficiently moderate temperature may be used forits formation that re-melting of the already beforehand formed other oneor two or more interconnections is avoided. This renders it impossiblethat the already formed other interconnection(s) start(s) becoming softor even liquid again, which might result in an undesired loss ofregistration accuracy between the various constituents of the package.The described behaviour may be ensured by a corresponding selection ofinterconnection materials (with corresponding melting temperatures),interconnection techniques (such as sintering, soldering and weldinginvolving corresponding processing temperatures) and correspondinginterconnection temperature, as well as selection of thermalconductivity of all materials of the package under manufacture, etc.

In an embodiment, the first interconnection comprises one of the groupconsisting of a solder structure and a sinter structure. For example, itis preferred for the first interconnection to be realized by hightemperature stable SnSb solder material. It is also preferred for thefirst interconnection to be realized by a diffusion solder material.Soldering has the advantage of low costs and may involve temperatures of200° C. to 400° C. Sintering has the advantage of providing a highreliability and involves temperatures of 200° C. to 250° C. However,other interconnections triggered by a temperature increase may beimplemented as well.

In particular, the second interconnection may comprise one of the groupconsisting of a solder structure and a sinter structure. For example, itis preferred for the second interconnection to be realized by a soldermaterial with a high ductility, as can be obtained by Pb solder or SnAgsolder. It is also preferred for the first interconnection to berealized by a diffusion solder material. However, other interconnectionstriggered by a temperature increase may be implemented as well.

In an embodiment, the package comprises at least one electricallyconductive spacer body, in particular at least one electricallyconductive and thermally conductive spacer body, between the at leastone electronic chip and the second heat removal body. Such a spacer bodymay be for instance a copper block with a selectable height and beingcapable of balancing out high differences between various elements ofthe package to be manufactured. A vertical current flow may run throughthe at least one spacer body during operation of the package.Furthermore, such a spacer body may be made of a highly thermallyconductive material such as copper or aluminium and may therebycontribute additionally to the two heat removal bodies to the removal ofheat from the package.

In an embodiment, the second interconnection directly connects the atleast one electronic chip with the at least one spacer body. In afurther embodiment, the package comprises a third interconnection whichdirectly connects the at least one spacer body with the second heatremoval body. In such an embodiment, altogether three interconnectionsare present which can be adjusted individually from one another in termsof melting or re-melting temperature or interconnection temperature.

In an embodiment, the third interconnection comprises one of the groupconsisting of a welding structure (for instance friction welding orultrasonic welding), a solder structure and a sinter structure. Weldingis cost efficient and may be carried out at moderate temperature. Forexample, it is preferred for the third interconnection to be realized bywelding. It is also preferred for the third interconnection to berealized by a diffusion solder material (for example a CuSn layer). Asmentioned above, other interconnection techniques involving triggeringthe connection only at or above a characteristic temperature can beimplemented as well.

In an embodiment, the third interconnection is configured to have alower melting or re-melting temperature than a material of at least oneof the first interconnection and the second interconnection. In such ascenario, the material of the third interconnection melts at firstduring a system melting procedure. This has turned out to increasereliability of the manufactured package, since not all threeinterconnections start melting at the same temperature.

In an embodiment, one of the first interconnection, the secondinterconnection and the third interconnection is configured to have ahigher melting or re-melting temperature than the other two of the firstinterconnection, the second interconnection and the thirdinterconnection. In such an embodiment, melting of one of theinterconnections is prevented while the other two interconnectionsalready start melting at a certain temperature. This allows to betterdefine the process and the properties of the resulting package.

In an embodiment, two of the first interconnection, the secondinterconnection and the third interconnection are configured to have ahigher melting or re-melting temperature than the remaining one of thefirst interconnection, the second interconnection and the thirdinterconnection. In such an embodiment, specifically one of theinterconnections starts melting at a relatively low melting temperatureand can therefore be handled separately in terms of interconnecting fromthe other interconnections. Thereby, the reliability of the manufacturedpackage may be improved.

In an embodiment, the first heat removal body is thermally coupled to afirst main surface of the at least one electronic chip and is configuredfor removing thermal energy from the at least one electronic chip. In afurther embodiment, the second heat removal body is thermally coupled(directly or indirectly) to a second main surface of the at least oneelectronic chip and is configured for removing thermal energy from theat least one electronic chip (see for instance FIG. 1). The second heatremoval body may also be thermally coupled to a main surface of anotherelectronic chip than an electronic chip thermally coupled to the firstheat removal body. Therefore, at least a constituent of the respectiveheat removal body may be made of a highly thermally conductive material,such as a ceramic (like aluminium oxide, aluminium nitride, siliconnitride, etc.).

In an embodiment, the package is configured for double-sided cooling. Insuch an embodiment, heat is removed from two opposing main surfaces ofthe one or more electronic chips. The heat may be dissipated via theheat removal bodies which may form part of an exterior surface of thepackage.

In an embodiment, the package comprises an electrically conductivecontact structure, in particular a leadframe, extending partially withinand partially outside of an encapsulant and being electrically coupledwith the at least one electronic chip. This allows to electricallyconnect the encapsulated electronic chip with an electronic periphery.The mentioned leadframe may extend partially within and partiallyoutside (in particular forming one or more exposed leads) of theencapsulant and may be electrically coupled with the at least oneelectronic chip (for instance by wire bonding). By such an electricallyconductive contact structure, the at least one electronic chip may becoupled to an electronic environment of the package. For this purpose,one or more legs of the electrically conductive contact structure mayextend beyond the encapsulant.

In an embodiment, the package comprises a chip carrier on which the atleast one electronic chip is mounted. It is also possible that more thanone chip carrier is provided in the package and/or that more than oneelectronic chip is mounted on one and the same chip carrier. Forexample, the at least one electronic chip may be mechanically and/orelectrically connected on the chip carrier, for instance by soldering,sintering, adhering, etc. The first heat removal body may be embodied aschip carrier.

In an embodiment, the package comprises electric connection elements, inparticular at least one of the group consisting of bond wires, bondribbons and solder structures, electrically connecting the chip carrierwith the electrically conductive contact structure. For example, suchelectric connection elements may be made of aluminum or copper.

In an embodiment, the first heat removal body is thermally coupled to afirst main surface of the at least one electronic chip and is configuredfor removing thermal energy from the at least one electronic chip,wherein the encapsulant may encapsulate part of the first heat removalbody. In an embodiment, the first heat removal body (and/or the secondheat removal body) may comprise a material having a high thermalconductivity so as to be capable of efficiently removing heat from theone or more electronic chips to an environment of the package. Inparticular, the thermal conductivity of at least one of the heat removalbodies as a whole or a material thereof may be at least 10 W/mK, inparticular at least 50 W/mK.

In an embodiment, the second heat removal body is thermally coupled to asecond main surface of the at least one electronic chip or of at leastone further electronic chip and is configured for removing thermalenergy from the at least one electronic chip or of the at least onefurther electronic chip, wherein the encapsulant may encapsulate part ofthe second heat removal body. The encapsulant may encapsulate part (inparticular only part, so that the second heat removal body forms part ofan exterior surface of the package, which is advantageous in terms ofits heat removal capability) of the second heat removal body. Theprovision of two heat removal bodies allows for a double-sided coolingarchitecture.

In an embodiment, the first heat removal body is configured as theabove-mentioned chip carrier. In such a configuration, the first heatremoval body may simultaneously serve for carrying the at least oneelectronic chip and for removing heat from the package, which heat isgenerated by the chip(s) during operation of the package.

In an embodiment, at least one of the first heat removal body and thesecond heat removal body comprises an electrically insulating (andpreferably highly thermally conductive) layer having a first mainsurface covered by a first electrically conductive layer and having asecond main surface covered by a second electrically conductive layer.For example, the electrically insulating layer may be simultaneouslyhighly thermally conductive, which can be accomplished for example bythe provision of a ceramic layer. At least one of the electricallyconductive layers may be a copper layer combining a high thermalconductivity with a high electrical conductivity. However, aluminum isalso a proper material selection for at least one of the electricallyconductive layers. For instance, at least one of the first heat removalbody and the second heat removal body may be configured as at least oneof the group consisting of a Direct Copper Bonding substrate (DCB), anda Direct Aluminum Bonding substrate (DAB).

Alternative chip carriers which may be used for other embodiments can beany interposer like a substrate, a ceramic substrate, a laminarsubstrate, a leadframe, an IMS (Insulated Metal Substrate), a PCB(printed circuit board), etc. In an embodiment, the second heat removalbody is mounted on the at least one spacer body before mounting the atleast one spacer body on the at least one electronic chip. In such anembodiment, the second heat removal body may be mounted on the spacerbody, and separately the at least one electronic chip may be mounted onthe first heat removal body. Thereby, two double layer stacks areobtained. Subsequently, the two double layer stacks may beinterconnected by interconnecting the at least one electronic chip withthe at least one spacer body by the second interconnect. Such anembodiment is highly preferred when the third interconnect ismanufactured at a high temperature which otherwise would cause a dangerof the first interconnect and/or the second interconnect to re-melt.This would cause the lower elements to swim or float on the re-meltedfirst interconnect, which would reduce spatial accuracy and reliabilityof the package.

Still referring to the previously described embodiment, the at least oneelectronic chip may be mounted on the first heat removal body beforemounting the at least one spacer body on the at least one electronicchip. Thus, it may be advantageous that firstly two separate doublestructure stacks are formed (i.e. electronic chip(s) on first heatremoval body, and second heat removal body on spacer body/bodies),before the two separate double structure stacks are interconnected (forinstance by soldering, sintering or welding).

In an embodiment, the encapsulant comprises at least one of the groupconsisting of a mold compound, and a laminate. In a preferredembodiment, the encapsulant is a mold compound. For the encapsulating bymolding, a plastic material or a ceramic material may be used. Theencapsulant may comprise an epoxy material. Filler particles (forinstance SiO₂, Al₂O₃, Si₃N₄, BN, AlN, diamond, etc.), for instance forimproving thermal conductivity may be embedded in an epoxy-based matrixof the encapsulant.

In an embodiment, the electronic chip is configured as a powersemiconductor chip. Thus, the electronic chip (such as a semiconductorchip) may be used for power applications for instance in the automotivefield and may for instance have at least one integrated insulated-gatebipolar transistor (IGBT) and/or at least one transistor of another type(such as a MOSFET, a JFET, etc.) and/or at least one integrated diode.Such integrated circuit elements may be made for instance in silicontechnology or based on wide-bandgap semiconductors (such as siliconcarbide, gallium nitride or gallium nitride on silicon). A semiconductorpower chip may comprise one or more field effect transistors, diodes,inverter circuits, half-bridges, full-bridges, drivers, logic circuits,further devices, etc.

In an embodiment, the electronic chip experiences a vertical currentflow. The package architecture according to exemplary embodiments of theinvention is particularly appropriate for high power applications inwhich a vertical current flow is desired, i.e. a current flow in adirection perpendicular to the two opposing main surfaces of theelectronic chip, one of which being used for mounting the electronicchip on the carrier.

In embodiments, the package may be configured as a half bridge, acascode circuit, a circuit constituted by a field effect transistor anda bipolar transistor being connected in parallel to one another, or apower semiconductor circuit. Therefore, the packaging architectureaccording to exemplary embodiments is compatible with the requirementsof very different circuit concepts.

In an embodiment, the package is configured as one the group consistingof a leadframe connected power module, a Transistor Outline (TO)electronic component, a Quad Flat No Leads Package (QFN) electroniccomponent, a Small Outline (SO) electronic component, a Small OutlineTransistor (SOT) electronic component, and a Thin More Outline Package(TSOP) electronic component. Therefore, the package according to anexemplary embodiment is fully compatible with standard packagingconcepts (in particular fully compatible with standard TO packagingconcepts) and appears externally as a conventional electronic component,which is highly user-convenient. In an embodiment, the package isconfigured as power module, e.g. molded power module. For instance, anexemplary embodiment of the electronic component may be an intelligentpower module (IPM).

As substrate or wafer forming the basis of the electronic chips, asemiconductor substrate, preferably a silicon substrate, may be used.Alternatively, a silicon oxide or another insulator substrate may beprovided. It is also possible to implement a germanium substrate or aIII-V-semiconductor material. For instance, exemplary embodiments may beimplemented in GaN or SiC technology.

Furthermore, exemplary embodiments may make use of standardsemiconductor processing technologies such as appropriate etchingtechnologies (including isotropic and anisotropic etching technologies,particularly plasma etching, dry etching, wet etching), patterningtechnologies (which may involve lithographic masks), depositiontechnologies (such as chemical vapor deposition (CVD), plasma enhancedchemical vapor deposition (PECVD), atomic layer deposition (ALD),sputtering, etc.).

The above and other objects, features and advantages of the presentinvention will become apparent from the following description and theappended claims, taken in conjunction with the accompanying drawings, inwhich like parts or elements are denoted by like reference numbers.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of exemplary embodiments and constitute a part of thespecification, illustrate exemplary embodiments.

In the drawings:

FIG. 1 shows a cross-sectional view of a double-sided cooling packageaccording to an exemplary embodiment.

FIG. 2 is an image showing a cross-sectional view of a package accordingto an exemplary embodiment.

FIG. 3 is an image showing a cross-sectional view of a package accordingto another exemplary embodiment.

FIG. 4 shows a schematic view of a vehicle with a package according toan exemplary embodiment.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

The illustration in the drawing is schematically.

Before describing further exemplary embodiments in further detail, somebasic considerations of the present inventors will be summarized basedon which exemplary embodiments have been developed which provide for anelectronically reliable package with low loss during operation.

According to an exemplary embodiment of the invention, a double-sidedcooling package implementing interconnect layers with differentproperties is provided.

A package or module may be composed of a lower Direct Copper Bondingsubstrate (DCB substrate) forming a first heat removal body, a firstsolder layer (forming a first interconnection), at least one electronicchip, a second solder layer (constituting a second interconnection), athird solder layer, and an upper DCB as an embodiment of a second heatremoval body. However, it has turned out that the conventional approachof using identical materials for the three interconnections (i.e. theabove-mentioned first, second and third solder layer) involvesreliability issues.

The present inventors have found that the mentioned threeinterconnections of the same material may involve problems during asystem soldering procedure. Such a system soldering procedure relates tothe formation of an arrangement of lower DCB, chip, spacer and upperDCB. When all three interconnections melt or re-melt at the sametemperature, undesired effects may occur. These can be recesses or voidareas below the electronic chip, undefined positioning or floating ofthe spacer bodies, undesired formation of connections of solder materialaround the spacer, etc. Such effects may conventionally reduce thereliability of the manufactured package.

Moreover, solder material has only limited thermal conductivity so thatthe thermal performance of such a conventional module may be notsufficient for high performance power applications. Moreover, the spaceconsumption resulting from the floating of the spacer bodies onto afront side of an electronic chip may deteriorate the thermalperformance, since the size of the spacer may need to be manufacturedlower than the emitter pad.

In order to overcome the above-mentioned and other shortcomings, anexemplary embodiment of the invention provides a package in which thedifferent interconnections are configured so that at least one of theinterconnections has a higher melting point than remaininginterconnections. This can for instance be accomplished by theimplementation of high temperature melting solder material (such asJ-Alloy or High Lead). Also the implementation of one or more sinterlayers substituting the conventional solder structures is anadvantageous measure. Furthermore, welding may be implemented asinterconnection technique for any of the interconnections of thepackage, but highly preferred for the uppermost one.

In a preferred embodiment, at least one of the three mentionedinterconnections is embodied as a material with lower meltingtemperature, since the entire height of the module or chip may berealized with a so-called Solder Jig during system soldering. Tolerancesof PCB, chip and spacer can be at least partially equilibrated byadjusting bridging properties of interconnect material (for instanceprovided by SnAg solder material). What concerns an interconnect belowan electronic chip, this may improve the thermal conductivity withregard to the lower DCB. Furthermore, the positional accuracy of theelectronic chip(s) may be improved, since floating may be reliablyprevented. This also increases the compactness of the device. Moreover,the reliability can be improved by taking the described measure.

The interconnection between electronic chip and spacer body may beconfigured so that the thermal conductivity with regard to the spacerbody is improved. The positional accuracy of the spacer body can besignificantly improved, since floating effects may be suppressed. Thisallows also to configure the spacer body with a larger size, which againfurther increases the thermal performance of the package.

What concerns the interconnection between spacer body and upper heatremoval body, it may be configured so that the thermal conductivitytowards the spacer body may be improved. It may be advantageous to formthis interconnection from a low melting material.

According to an exemplary embodiment of the invention, a double-sidedcooling module for power semiconductor applications is provided whichhas an electric isolation integrated in the package or module. Theinterconnections of such a package may be configured so that one of thethree interconnections has a higher melting or re-melting point than theremaining interconnect layers. It is also advantageous that two of thethree interconnections have a higher melting or re-melting point thanthe remaining interconnection.

In particular for the third interconnection, welding has turned out asan interesting alternative to soldering or sintering. Welding does notnecessarily involve a separate interconnection material, but simplyconnects the two constituents to be connected when the local temperaturein between is sufficiently high to make one or both of the constituentsmelt.

The following Table 1 shows different embodiments of the invention interms of configuration of the various interconnections (firstinterconnection between first heat removal body and at least oneelectronic chip, second interconnection between at least one electronicchip and at least one spacer body, third interconnection between atleast one spacer body and second heat removal body):

TABLE 1 First Second Third Embodiment Interconnection InterconnectionInterconnection Embodiment sinter solder solder A Embodiment soldersinter solder B Embodiment solder solder sinter C Embodiment soldersinter sinter D Embodiment sinter solder sinter E Embodiment sintersinter solder F Embodiment solder solder weld G Embodiment solder sinterweld H Embodiment sinter solder weld I Embodiment sinter sinter weld J

The following Table 2 provides further embodiments of the invention interms of melting or re-melting temperatures of the variousinterconnections. In this Table 2, the three mentioned melting orre-melting temperatures X, Y, Z meet the condition X>Y>Z. referring toTable 2, each of the first interconnection, second interconnection andthird interconnection may be freely selected from the group ofsintering, soldering, and welding.

TABLE 2 First Second Third Embodiment Interconnection InterconnectionInterconnection Embodiment X Y Y I Embodiment Y X Y II Embodiment Y Y XIII Embodiment X X Y IV Embodiment X Y X V Embodiment Y X X VIEmbodiment X Y Z VII Embodiment X Z Y VIII Embodiment Y X Z IXEmbodiment Y Z X X Embodiment Z X Y XI Embodiment Z Y X XII

In the following, three specifically preferred embodiments will bedescribed in more detail:

In a first preferred embodiment, the first interconnection is embodiedas a solder interconnection (for instance using Sb-based soldermaterial), the second interconnection is embodied as solderinterconnection using the same solder material as the firstinterconnection, and the third interconnection is embodied as a weldingconnection.

In a second preferred embodiment, the first interconnection is embodiedas a solder interconnection (for instance using diffusion soldermaterial), the second interconnection is embodied as solderinterconnection using another solder material (for instance a ductilehigh-melting solder material such as SnSb-solder or Pb-solder) than thefirst interconnection, and the third interconnection is embodied as awelding connection.

In a third preferred embodiment, the first interconnection is embodiedas a solder interconnection (for instance using SnAg-based soldermaterial), the second interconnection is embodied as solderinterconnection using the same solder material as the firstinterconnection, and the third interconnection is embodied as yetanother solder connection (for instance SnSb-based solder).

In all three embodiments, mounting of the spacer bodies on the upper DCBis possible without re-melting of the chips and the lower DCB.

FIG. 1 shows a cross-sectional view of a double-sided cooling package100 according to an exemplary embodiment.

The package 100 according to FIG. 1 comprises two electronic chips 102which are here embodied as power semiconductor chips. The electronicchip 102 shown on the left hand side of FIG. 1 may be a diode chip,whereas the electronic chip 102 shown on the right-hand side of FIG. 1may be an IGBT (Insulated Gate Bipolar Transistor) chip.

A first heat removal body 104, which is here embodied as Direct CopperBonding (DCB) substrate, is thermally and mechanically coupled to afirst main surface of the electronic chips 102 and forms part of anexterior surface of the package 100. The first heat removal body 104 isconfigured for removing thermal energy from the electronic chips 102during operation of the package 100 to a package external cooling bodyand/or cooling fluid (not shown). The first heat removal body 104comprises a central electrically insulating and thermally conductivelayer 110, here made of ceramic material, having a first main surfacecovered by a first electrically conductive layer 112, which is hereembodied as a copper layer, and having an opposing second main surfacecovered by a second electrically conductive layer 114, which is hereembodied as a further copper layer. The electronic chips 102 are mountedand soldered or sintered on the first heat removal body 104 and areelectrically connected with the first electrically conductive layer 112by bond wires 176. Hence, the first heat removal body 104 functions as achip carrier and as a heat sink. The second electrically conductivelayer 114 of the first heat removal body 104 forms part of an exteriorsurface of the package 100 and thereby significantly contributes to theheat removal from the electronic chips 102 during operation of thepackage 100.

Optional electrically conductive and thermally conductive spacer bodies126, which may be embodied as copper blocks, are soldered or sinteredonto upper main surfaces of the electronic chips 102.

Moreover, a second heat removal body 106 is thermally coupled to asecond main surface of the electronic chips 102 via the spacer bodies126. Also the second heat removal body 106 comprises a centralelectrically insulating and thermally conductive layer 110, which may bemade of ceramic, having a first main surface covered by a firstelectrically conductive layer 112, which is here embodied as a copperlayer, and having an opposing second main surface covered by a secondelectrically conductive layer 114, which is here embodied as a furthercopper layer. The first electrically conductive layer 112 of the secondheat removal body 106 is soldered or sintered or welded onto the spacerbodies 126. The second electrically conductive layer 114 of the secondheat removal body 106 forms part of an exterior surface of the package100 and thereby significantly contributes to the heat removal from theelectronic chips 102 during operation of the package 100. As a whole,the second heat removal body 106 is configured as a heat sink forremoving thermal energy from the electronic chips 102.

An electrically conductive contact structure 118, here embodied as aleadframe, extends partially within and partially outside of theencapsulant 108 and is electrically coupled with the electronic chips102 via a solder or sinter connection with the patterned firstelectrically conductive layer 112 of the first heat removal body 104 andvia the bond wires 176.

Furthermore, the package 100 comprises a mold-type encapsulant 108encapsulating the electronic chips 102, the spacer bodies 126, only partof the electrically conductive contact structure 118, only part of thefirst heat removal body 104 and only part of the second heat removalbody 106. The part of the electrically conductive contact structure 118encapsulated by the encapsulant 108 serves for electrically contactingthe electronic chips 102, whereas another part of the electricallyconductive contact structure 118 exposed from the encapsulant 108provides one or more leads for connection with an electronic peripherydevice (not shown). Since the electrically conductive contact structure118 extends partially within and partially outside of the encapsulant108 and is electrically coupled with the electronic chips 102, it iscapable of providing an electric coupling between an exterior and aninterior of the package 100.

The package 100 may be manufactured as follows: The heat removal bodies104, 106 as well as the electrically conductive contact structure 118may be roughened by etching. Thereafter, the electronic chips 102 may besoldered or sintered onto the first heat removal body 104. After that,connection of the electrically conductive contact structure 118 with thefirst heat removal body 104 may be accomplished by soldering orsintering, wire bonding, etc. Then, the optional spacer bodies 126 maybe soldered or sintered on top of the electronic chips 102. This can befollowed by a solder or sinter or welding connection of the second heatremoval body 106 on the spacer bodies 126. After that, encapsulation bymolding may be carried out so that the encapsulant 108 fills the gapsbetween the mentioned constituents and keeps external surfaces of theheat removal bodies 104, 106 uncovered.

The electronic chips 102 are mounted on the patterned first electricallyconductive layer 112 of the first heat removal body 104 by a firstinterconnection 170. The spacer bodies 126 are mounted on the electronicchips 102 by a second interconnection 172. The first electricallyconductive layer 112 of the second heat removal body 106 is mounted onthe spacer bodies 126 and above the electronic chips 102 by thirdinterconnection 174. Each of the first interconnection 170, the secondinterconnection 172 and the third interconnection 174 may be a solderstructure or a sinter structure or may be formed by welding.

The first interconnection 170 can be configured to have another meltingor re-melting temperature than the second interconnection 172 and thethird interconnection 174. Advantageously, the materials of the firstinterconnection 170, the second interconnection 172 and the thirdinterconnection 174 may be different from one another, in particular mayhave different melting points. For instance, the first interconnection170 may be made of a material having another melting temperature than amaterial of which the second interconnection 172 is made. It is alsopossible that the third interconnection 174 is made of a material havinga lower melting temperature than a material of at least one of the firstinterconnection 170 and the second interconnection 172. The thirdinterconnection 174 may however also be a welding interconnection whichdoes not involve an additional material. Advantageously, one of thefirst interconnection 170, the second interconnection 172 and the thirdinterconnection 174 is made of a material having a higher meltingtemperature than the other two of the first interconnection 170, thesecond interconnection 172 and the third interconnection 174. It is inparticular possible that two of the first interconnection 170, thesecond interconnection 172 and the third interconnection 174 are made ofa material having a higher melting temperature than the remaining one ofthe first interconnection 170, the second interconnection 172 and thethird interconnection 174.

By configuring the interconnections 170, 172, 174 in the described way,the package 100 may be manufactured with high reliability. Inparticular, spatial accuracy of the electronic chips 102 and of thespacer bodies 126 may be high, because undefined floating due to asimultaneous melting of all interconnections 170, 172, 174 may beprevented. Furthermore, undesired reflow of solder material ontoundefined surfaces of the spacer bodies 126 may be prevented. Also, theformation of fjord-shaped recesses or unfilled volumes beneath theelectronic chips 102 may be safely prevented.

FIG. 2 is an image showing a cross-sectional view of a package 100according to an exemplary embodiment.

FIG. 2 shows an embodiment in which the electronic chip 102 is sinteredon a lower DCB (Direct Copper Bonding substrate) as first heat removalbody 104. Spacer bodies 126 are soldered onto a front side of theelectronic chip 102. Furthermore, the spacer bodies 126 may be solderedonto an upper DCB as second heat removal body 106. A very highreliability can be obtained with this type of package 100.

FIG. 3 is an image showing a cross-sectional view of a package 100according to another exemplary embodiment.

Referring to the embodiment of FIG. 3, the electronic chip 102 has beensintered on a lower DCB as first heat removal body 104. The spacerbodies 126 are sintered on the front side of the electronic chip 102.The spacer bodies 126 are furthermore soldered onto an upper DCB assecond heat removal body 106.

Also with the embodiment of FIG. 3, a very high reliability may beachieved.

FIG. 4 shows a schematic view of a vehicle 122 with a package 100according to an exemplary embodiment.

More specifically, the power package 100 may form part of a controlblock 152 controlling operation of engine/battery block 154. Hence, apackage 100 or power module according to an exemplary embodiment of theinvention may be used for an automotive application. A preferredapplication of such a power package 100 is an implementation as aninverter circuit or inverted rectifier for vehicle 122 which may be anelectrically driven vehicle or which may be a hybrid vehicle. Such aninverter may transfer a direct current (DC) of the battery into analternating current (AC) for driving the electric engine of vehicle 122.In a hybrid vehicle, it is also possible to at least partially recovermechanical energy and to transfer it, by the inverter, back intoelectric energy to recharge the battery. In such an automotive inverterapplication, extreme amounts of heat are generated during operation ofthe power package 100. This heat can be efficiently removed by thedouble-sided cooling concept described above. However, it should be saidthat, in other embodiments, also single-sided cooling may be sufficient.

In the following, various exemplary aspects of a package according tothe present invention are summarized:

Aspect 1: A package, comprising:

-   -   at least one electronic chip;    -   a first heat removal body on which the at least one electronic        chip is mounted by a first interconnection;    -   a second heat removal body mounted on or above the at least one        electronic chip by a second interconnection;        wherein the first interconnection is configured to have another        melting temperature than the second interconnection.

Aspect 2: The package according to aspect 1, comprising an encapsulantencapsulating at least part of the at least one electronic chip, part ofthe first heat removal body and part of the second heat removal body.

Aspect 3: The package according to aspect 1, wherein the firstinterconnection comprises one of the group consisting of a solderstructure and a sinter structure.

Aspect 4: The package according to aspect 1, wherein the secondinterconnection comprises one of the group consisting of a solderstructure and a sinter structure.

Aspect 5: The package according to aspect 1, comprising at least oneelectrically conductive spacer body, in particular at least oneelectrically conductive and thermally conductive spacer body, betweenthe at least one electronic chip and the second heat removal body.

Aspect 6: The package according to aspect 5, wherein the secondinterconnection directly connects the at least one electronic chip withthe at least one spacer body.

Aspect 7: The package according to aspect 1, wherein at least the firstinterconnection comprises Pb-based solder material or SnSb-based soldermaterial.

Aspect 8; The package according to aspect 5, comprising a thirdinterconnection which directly connects the at least one spacer bodywith the second heat removal body.

Aspect 9: The package according to aspect 8, wherein the thirdinterconnection comprises one of the group consisting of a weldingstructure, a solder structure and a sinter structure.

Aspect 10: The package according to aspect 8, wherein the thirdinterconnection is configured to have a lower melting temperature thanat least one of the first interconnection and the secondinterconnection.

Aspect 11: The package according to aspect 10, wherein the secondinterconnection and the third interconnection is configured to have alower melting temperature than the first interconnection.

Aspect 12: The package according to aspect 8, wherein at least one ofthe second interconnection and the third interconnection comprisesPb-based material or Ag-based material, in particular SnAg.

Aspect 13: The package according to aspect 8, wherein one of the firstinterconnection, the second interconnection and the thirdinterconnection is configured to have a higher melting temperature thanthe other two of the first interconnection, the second interconnectionand the third interconnection.

Aspect 14: The package according to aspect 8, wherein two of the firstinterconnection (170), the second interconnection and the thirdinterconnection are configured to have a higher melting temperature thanthe remaining one of the first interconnection, the secondinterconnection and the third interconnection.

Aspect 15: The package according to aspect 1, configured fordouble-sided cooling.

Aspect 16. The package according to aspect 1, wherein at least one ofthe first heat removal body and the second heat removal body comprisesan electrically insulating layer having a first main surface covered bya first electrically conductive layer and having a second main surfacecovered by a second electrically conductive layer.

Aspect 17: A package, comprising:

-   -   at least one electronic chip;    -   a first heat removal body on which the at least one electronic        chip is mounted by a first interconnection;    -   a second heat removal body mounted above the at least one        electronic chip;    -   at least one spacer body arranged between the at least one        electronic chip and the second heat removal body;    -   a second interconnection connecting the at least one electronic        chip with the at least one spacer body;    -   a third interconnection connecting the at least one spacer body        with the second heat removal body;    -   wherein one of the first interconnection, the second        interconnection, and the third interconnection has another        melting temperature than at least one other of the first        interconnection, the second interconnection, and the third        interconnection.        Aspect 18: The package according to aspect 17, comprising an        encapsulant encapsulating at least part of the at least one        electronic chip, at least part of the at least one spacer body,        part of the first heat removal body and part of the second heat        removal body.

In the following, various exemplary aspects of a method of manufacturinga package according to the present invention are summarized:

Aspect 1: A method of manufacturing a package, wherein the methodcomprises:

-   -   mounting at least one electronic chip on a first heat removal        body by a first interconnection;    -   mounting at least one spacer body on the at least one electronic        chip by a second interconnection;    -   mounting a second heat removal body on the spacer body by a        third interconnection;    -   wherein one of the first interconnection, the second        interconnection, and the third interconnection has a melting        temperature different from the other two of the first        interconnection, the second interconnection, and the third        interconnection.

Aspect 2: The method according to aspect 1, wherein the second heatremoval body is mounted on the at least one spacer body before mountingthe at least one spacer body on the at least one electronic chip.

Aspect 3: The method according to aspect 2, wherein the at least oneelectronic chip is mounted on the first heat removal body beforemounting the at least one spacer body on the at least one electronicchip.

Aspect 4: The method according to aspect 1, wherein forming the last ofthe first interconnection, the second interconnection, and the thirdinterconnection is carried out at a low enough interconnectiontemperature that the other two previously formed interconnections areprevented from melting or re-melting during forming the lastinterconnection.

It should be noted that the term “comprising” does not exclude otherelements or features and the “a” or “an” does not exclude a plurality.Also elements described in association with different embodiments may becombined. It should also be noted that reference signs shall not beconstrued as limiting the scope of the claims. Moreover, the scope ofthe present application is not intended to be limited to the particularembodiments of the process, machine, manufacture, composition of matter,means, methods and steps described in the specification. Accordingly,the appended claims are intended to include within their scope suchprocesses, machines, manufacture, compositions of matter, means,methods, or steps.

What is claimed is:
 1. A package, comprising: at least one electronicchip; a first heat removal body on which the at least one electronicchip is mounted by a first interconnection; a second heat removal bodymounted on or above the at least one electronic chip by a secondinterconnection; at least one electrically conductive spacer bodybetween the at least one electronic chip and the second heat removalbody; a third interconnection which directly connects the at least onespacer body with the second heat removal body; wherein the firstinterconnection, the second interconnection and the thirdinterconnection are each configured to have different meltingtemperatures.
 2. The package according to claim 1, comprising anencapsulant encapsulating at least part of the at least one electronicchip, part of the first heat removal body and part of the second heatremoval body.
 3. The package according to claim 1, wherein the firstinterconnection comprises one of the group consisting of a solderstructure and a sinter structure.
 4. The package according to claim 1,wherein the second interconnection comprises one of the group consistingof a solder structure and a sinter structure.
 5. The package accordingto claim 1, wherein the at least one electrically conductive spacer bodycomprises at least one electrically conductive and thermally conductivespacer body.
 6. The package according to claim 1, wherein the secondinterconnection directly connects the at least one electronic chip withthe at least one spacer body.
 7. The package according to claims 1,wherein at least the first interconnection comprises Pb-based soldermaterial or SnSb-based solder material.
 8. The package according toclaim 1, wherein the third interconnection comprises one of the groupconsisting of a welding structure, a solder structure and a sinterstructure.
 9. The package according to claim 1, wherein the thirdinterconnection is configured to have a lower melting temperature thanat least one of the first interconnection and the secondinterconnection.
 10. The package according to claim 9, wherein thesecond interconnection and the third interconnection is configured tohave a lower melting temperature than the first interconnection.
 11. Thepackage according to claim 1, wherein at least one of the secondinterconnection and the third interconnection comprises Pb-basedmaterial or Ag-based material.
 12. The package according to claim 1,wherein one of the first interconnection, the second interconnection andthe third interconnection is configured to have a higher meltingtemperature than the other two of the first interconnection, the secondinterconnection and the third interconnection.
 13. The package accordingto claim 1, wherein two of the first interconnection (170), the secondinterconnection and the third interconnection are configured to have ahigher melting temperature than the remaining one of the firstinterconnection, the second interconnection and the thirdinterconnection.
 14. The package according to claim 1, configured fordouble-sided cooling.
 15. The package according to claim 1, wherein atleast one of the first heat removal body and the second heat removalbody comprises an electrically insulating layer having a first mainsurface covered by a first electrically conductive layer and having asecond main surface covered by a second electrically conductive layer.16. The package according to claim 1, comprising an encapsulantencapsulating at least part of the at least one electronic chip, atleast part of the at least one spacer body, part of the first heatremoval body and part of the second heat removal body.
 17. The packageaccording to claim 11, wherein at least one of the secondinterconnection and the third interconnection comprises SnAg.
 18. Avehicle comprising a package according to claim 1.